Design and Simulation of Electron Beam Low Impedance Deflection Scanning Coil Based on Helmholtz Coil
LI Pinglin1, ZHANG Wei1, XU Haiying2, HUANG Yewen1
(1. School of Mechanical Engineering & Automation, Beihang University, Beijing 100191, China;
2. National Key Laboratory of Science and Technology on Power Beam Processes, AVIC Manufacturing Technology
Institute, Beijing 100024, China)
Abstract:In order to improve the electron beam deflection scanning frequency and magnetic field uniformity, a low
impedance deflection scanning coil for the electron beam gun is designed, employing the Helmholtz air-core coil. Adopting
the finite element analysis software ANSYS workbench, the magnetic field distribution of the deflection scanning coil is
simulated, and the electromagnetic field in the coil is measured by the gauss meter. It showed that the analog data is consistent
with the measured data and the magnetic flux density and uniformity of the magnetic field inside the coil could satisfy
the requirement of the electron beam high frequency deflection scanning. The actual scanning test showed that the coil can
achieve the two-point electron beam high frequency deflection scanning, reaching a 30kHz frequency.