Ultra-Precision Grinding and On-Machine Precision Truing for Optical Elements With Complex Surfaces
GUO Bing1, ZHAO Qingliang1, CHEN Bing2, WANG Jinhu3, ZHANG Chunyu1, WU Mingtao1, PAN Yongcheng1
1. School of Mechanical and Electrical Engineering, Harbin Institute of Technology, Harbin 150001, China;
2. Intelligent Manufacturing Institute, Hunan University of Science and Technology, Xiangtan 411201, China;
3. Ultra-precision Machining Center, Zhejiang University of Technology, Hangzhou 310014, China
Micron-scale surface accuracy and nano-scale surface roughness, as well as the processing interference, path limitation, tool wear, and inefficiency caused by their surface structure, restrict the application of complex surface optical components seriously. In order to solve it, the ultra-precision grinding of the typical complex surface optical components was investigated systematically. A variety of on-machine precision truing for diamond grinding wheels was proposed, and the corresponding ultra-precision grinding technologies were presented. As the results, the single crystal silicon aspheric surface with the roughness Ra of less than 5nm, the form accuracy PV of less than 527nm/140mm; the sapphire conformal window with the form accuracy PV of less than 2.5μm/50mm; the binderless tungsten carbide micro-structured surface with the roughness Ra of less than 70nm was obtained by ultra-precision grinding.
2019, 
