Carbon fiber reinforced plastic (CFRP) is widely used in the fields of aerospace, national defense and medical treatment. In the traditional process of drilling CFRP, there exist the problems of delamination at the entrance and exit, tearing and burrs. In the paper, the vibration assisted drilling process is used to improve the traditional process of drilling CFRP. In order to predict the effect of vibration assisted drilling of CFRP effectively, the modeling of finite element simulation of vibration assisted drilling is carried out by combining the constitutive model of CFRP. Firstly, the mechanical model of CFRP is established by considering the existing constitutive model while the cohesive element is used to simulate the interlayer damage. Then the influence of vibration is realized by applying the vibration movement to the boundary condition of cutting tool in the established model of finite element simulation. The finite element model is verified by comparing the simulation results with the experimental results. Finally, the simulation results of traditional drilling and vibrationassisted drilling are analyzed, which demonstrates that the latter one can effectively reduce the thrust force and suppress the burrs and delamination.