Abstract:To meet the demand of ultra-precision machining for large-size optical components, the research group further developed high-precision surface grinder UPG80 on the basis of the two self-developed grinders, MK7160 and 2MK1760. Compared with most existing large-caliber surface grinders and MK7160, 2MK1760 grinders, UPG80 used more advanced key supporting technology, including hydrostatic support technology, grinding wheel dressing technology and intelligent monitoring system. In this paper, the static accuracy of UPG80 grinder was tested, and a three-axis error model was established to compensate the error of the grinder. On this basis, the optical components with 530mm×530mm diameter were machined by diamond circular arc grinding wheel, and good processing effect was obtained, which verifies the reliability of the grinder