Research of Megasonic Assisted Micro Electroforming Process Based on a Novel Megasonic Reactor
DU Liqun1,2, ZHAI Ke1, JI Xuechao1, WEI Zhuangzhuang1, DU Chengquan1, LIU Xuqiang1
1. Key Laboratory for Micro/Nano Technology and System of Liaoning Province, Dalian University of Technology, Dalian 116024, China;
2. Key Laboratory for Precision and Non-Traditional Machining Technology of the Ministry of Education, Dalian University of Technology, Dalian 116024, China
Megasonic has obvious advantages in overcoming the limitations of micro-electroforming process because of its low cavitation effect, high sound intensity and acoustic streaming. In this work, a bidirectional surface mount device (SMD) megasonic electrolytic bath was designed. And an integrated megasonic electroforming equipment was designed and made considering of other components of an electroforming reactor. Single directional megasonic assisted electrodeposition and bidirectional megasonic assisted electrodeposition was investigated, respectively. Besides, a traditional deposition of nickel was conducted as the control group. The results show that the planeness value (PV) of electrodeposited layer is 15.03μm without megasonic wave, and the PV of nickel electrodeposited layer is 15.36μm with single directional megasonic assisted. The bidirectional megasonic wave assisted electrodeposition has a planeness value 10.91μm, which obtained the most uniform electrodeposited layer among these three different electrodeposition conditions. Besides, bidirectional megasonic wave assisted electrodeposition can achieve better surface morphology than other conditions.
杜立群，翟科，姬学超，魏壮壮，杜成权，刘旭强. 兆声波精密微电铸设备及相关工艺研究[J]. 航空制造技术, 2018, 61(21): 52-56.
DU Liqun, ZHAI Ke, JI Xuechao, WEI Zhuangzhuang, DU Chengquan, LIU Xuqiang. Research of Megasonic Assisted Micro Electroforming Process Based on a Novel Megasonic Reactor[J]. Aeronautical Manufacturing Technology, 2018, 61(21): 52-56.
2018, 
