It is a big challenge for the traditional calibration to make friction and backlash, so a wide scale and high accuracy calibration technology of linear displacement sensor is proposed. Taking laser interferometer as the reference, linear motor and bearing sliders are the driving unit, the grating achieves closed-loop control, and the positioning accuracy is on the micron level. Meanwhile, by a six-degree-of-freedom adjustable fixture in the calibration process, the reference direction is aligned with the measurement direction to eliminate the Abbe error. Meanwhile, aiming at the special float type sensor, a special fixture is designed to eliminate the deformation with support points, which solves the deformation problem of the measuring rod in the calibration process. The evaluation and verification of the uncertainty show that the calibration method is feasible and effective.