During the electron beam rapid manufacturing procedure of large metal work piece, the electron beam is used for scanning and heating in order to implement real-time annealing treatment which can eliminate the residual stress in the electron beam freedom fabrication process and reduce the deformation caused by the stress accumulation. In this paper, an electron beam high-frequency deflection scan control experiment platform, which consists of industrial computer, waveform generation card, drive circuit, and deflection scanning coil, is built to generate X, Y output waveform, do rectangular scan and circular offset scan. LabVIEW is used to develop the software interface. A real time annealing finite element model is built to analyze the influence of scanning on temperature distribution difference in a range of 100mm×100mm. The conclusion is the temperature difference in the area is reduced from 94℃ to 11℃ which improves the uniformity of the temperature distribution when the beam current is 30mA, beam spot radius is 4mm, beam spot overlap is 1mm, and using the electron beam to scan for 0.6323s with a speed of 25m/s.