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| Review on High Temperature Thin Film Thermocouple for Aero-Engine |
| ZHOU Yingfeng, CUI Zaifu, LI Xin, ZHOU Paidi, LI Yali, CHEN Qinnan, SUN Daoheng |
| (School of Aerospace Engineering, Xiamen University, Xiamen 361102, China) |
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Abstract High temperature film thermocouple is considered as an effective method to measure temperature in extreme environment such as turbine blade, combustion chamber wall and inlet and outlet gas temperature of aero-engine. This paper introduces the research history and current situation of high temperature thin film thermocouple for aero-engine, and summarizes the trends of thin film thermocouple from the thin film material, device performance and applications. The challenges of the current thin film thermocouple in the high temperature stability of sensitive materials, the process of multilayer thin film material system on conductive substrate and the fabrication of sensing thin film on curved surface are analyzed. It also points out the development direction of thin film thermocouple in the future
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2020, 
