Carbon fiber reinforced plastics (CFRP) and titanium (Ti) stacks are used widely in aviation, aerospace, automobile and other fields owing to the excellent performance. Because of the difference of material processing characteristics, different parameters are applied in drilling process of CFRP and Ti for satisfactory processing quality. However, CFRP and Ti are usually drilled together for the coaxiality of holes and machining efficiency. There are a lot of problems when drilling CFRP/Ti stacks, such as interface burns of holes, scratch of CFRP and the worse aperture consistency. In order to solve the above problems, a low temperature drilling process was proposed, and the drilling thrust, aperture consistency and surface quality of CFRP/Ti stacks in low temperature were studied by drilling experiments. The results show that the thrust force of CFRP/Ti stacks increases while aperture consistency and surface quality are improved in low temperature, which prove the feasibility of drilling CFRP/Ti stacks in low temperature.