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Design and Experimental Research of Textured Lapping Plate for Sapphire Machining |
WAN Linlin1, 2, GUO Jinwei1, 2, LIU Wei1, 2, ZHANG Xianyang1, 2, RAN Xiaoru3 |
1. Hunan University of Science and Technology, Xiangtan 411201, China;
2. Hunan Key Laboratory of High Efficiency and Precision Machining of Difficult-to-Machining Materials, Xiangtan 411201, China;
3. Hunan Jove Precision Machine Co., Ltd., Xiangtan 411200, China |
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Abstract Sapphire wafers are affected by many factors during the lapping machining, In order to improve the surface quality of the sapphire lapping machining, by consideration of the volume distribution and flow uniformity of the lapping liquid, the surface texture of the lapping plate is designed. The finite element method is used to simulate the flow field of the designed lapping plate. At the same time, the stress distribution on the surface of lapping plate was simulated by finite element method. In order to verify the processing performance of the lapping plate, the designed lapping plate is compared with the ordinary lapping plate in the lapping experiment. The results show that the design of Archimedes spiral groove plus radial groove with groove width of 2 mm and groove depth of 1 mm is adopted, the surface roughness of the sapphire wafer reaches 0.210 μm, the surface of the wafer has no damage such as crushing and pits, the effect is significantly better than the ordinary lapping plate, therefore the lapping plate designed in this paper has better machining performance.
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