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| MEMS Sensors for High Temperature Measurement on Nozzle Guide Vane Surface |
| DUAN Li1 ， JI Zhonglin1 , WENG Haotian1 ,LI Jibao2 , LIN Yuzhen3 , CAO Xueqiang4 |
| ( 1. School of Electric Information and Electrical Engineering, Shanghai Jiaotong University, Shanghai 200241, China; 2. AECC Commercial Aircraft Engine Co., Ltd., Shanghai 200240, China; 3. School of Energy and Power Engineering, Beihang University, Beijing 100191, China; 4. School of Materials Science and Engineering, Wuhan University of Technology, Wuhan 430070, China ) |
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Abstract Thin film high temperature sensors have been successfully fabricated on the surface of aero-engine turbine blade by the aid of MEMS micro manufacturing technology. A series of key challenges such as high temperature insulation, lithography on the curved surface, high temperature interconnection have been overcome during the endeavor of the sensor development. The thin film sensor together with the connecting wires can stand for the tough vibration and shocking test (10–2000 Hz/40g vibration intensity and 8g semi-sinusoidal impulse shocking test). The embedded thin film MEMS thermocouple sensor is also capable to detect the high temperature up to 1200℃ in the burning air flow inside aeroengine combustion chamber. The advantage of these thin film sensors is small in size and easy to install, therefore avoiding the disturbance to the environment and less destruction to the blade as possible. They can also be made in batch to form a sensor array for high temperature distribution studies.
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2020, 
