The role of elastic vibration honing finishing on surface integrity of 16Cr3NiWMoVNbE gear was experimentally examined, by comparing profile feature of tooth chamfering, surface morphology and roughness, crosssectional metallurgic microstructure and microhardness, surface residual stress. Compared to the gear without finishing, elastic vibration honing has improved the chamfering profile, decreased surface roughness and promoted surface residual compressive stress. Such improvements increased with prolong finishing periods of elastic vibration honing. After prolonging for twice times of finishing period, arc transition at crest chamfer and fine mesh strips have been achieved. Moreover, the surface roughness has been decreased from Sa0.47 μm to Sa0.2 μm, and the average surface residual compressive stress has been enhanced by 52%. The results give a reference for process design of elastic vibration honing finishing on hard-machining aircraft gears.