Study on Fabrication of Metal Interdigital Electrodes on LiNbO3 Substrate by Ultrafast Laser
ZHOU Tianfeng1, 2, 3, ZHANG Danmei1, LIU Peng2, 3, LI Peihuan1, XIE Qiuchen2, LI Ziwei1, WANG Xibin2, 3
1. School of Medical Technology, Beijing Institute of Technology, Beijing 100081,China;
2. School of Mechanical Engineering, Beijing Institute of Technology, Beijing 100081,China;
3. Chongqing Innovation Center, Beijing Institute of Technology, Chongqing 401120, China
The Ag–Cr film on the LiNbO3 substrate was etched by an ultrafast pulsed laser with a wavelength of 1064 nm, a pulse width of 10 ps, and a repeat frequency of 100 kHz. The effects of laser energy density and scanning speed on the quality of etched grooves on Ag–Cr films were studied to improve the groove quality. The results show that the laser energy density of 5.38 J/cm2 and the scanning speed of 500 mm/s are the optimal laser parameters for etching grooves. In this case, the substrate at the bottom of the trench is intact, and there is no obvious crack at the edge of the trench, which ensures that the final etched interdigital electrode has excellent performance. At the same time, the corresponding groove width is about 14 μm, which makes it possible to process high-quality interdigital electrodes with a line width of 14 μm and above, which can meet the needs of interdigital electrodes for surface acoustic wave devices in the biomedical field. A pair of interdigital electrodes for surface acoustic wave devices in the biomedical field were designed and fabricated with optimized parameters. They have high machining accuracy, good surface morphology and no defects such as adhesion between electrodes.
周天丰,张丹梅,刘朋,李沛桓,谢秋晨,李紫薇,王西彬. 超快激光制备铌酸锂基金属叉指电极工艺研究[J]. 航空制造技术, 2022, 65(23/24): 81-89.
ZHOU Tianfeng, ZHANG Danmei, LIU Peng, LI Peihuan, XIE Qiuchen, LI Ziwei, WANG Xibin. Study on Fabrication of Metal Interdigital Electrodes on LiNbO3 Substrate by Ultrafast Laser[J]. Aeronautical Manufacturing Technology, 2022, 65(23/24): 81-89.