Abstract：Diamond-like carbon (DLC) films have attracted more and more attention due to their promising mechanical
and tribological properties. However, there are some problems in DLC films such as high internal stress, low thermal
stability, which restrict the further application and development of DLC films. Moderate metal doped in the DLC films can
form nanocrystallines or MeC nanoparticles in the matrix, which depend on the bonding mode between metal and carbon.
Those particles with high activity increase the grain boundary slip and change the structure of films, which in turn improve
the mechanical and tribological performance of DLC films, and thus provide a new idea for the application and development
of the film. Current research progress of the metal doped DLC films is summarized and the development trend of
those films in the future is put forward.
2017, 
