Stack materials composed of CFRP (Carbon Fiber Reinforced Plastic) and titanium alloys are widely used in the aerospace field due to their excellent properties. However, the machining properties of the two materials are quite different in all aspects. During the single-shot drilling of compound stacks, some defects like entrance spalling and hole wall scratching are easily induced by the evacuation of titanium alloy chips. In order to improve the hole quality of stack materials, this research studied the influence of different amplitudes (A=0μm, 20μm, 40μm, 60μm) on cutting force, cutting temperature and hole quality by comparing the low frequency vibration drilling with the traditional drilling. The results show that the average axial force decreases with the increase of amplitude while the maximum axial force increases. Lowfrequency vibration drilling drills the temperature to drop somewhat compared to the traditional drilling. Vibration drilling has no improvement on decreasing delamination defects and it tends to increase defects, but it can improves the quality of CFRP hole walls.