A Frictional Contact MEMS Inertial Switch Based on Micro Electroforming Technology
DU Liqun 1,2, YANG Xiaochen2 , YU Yang2 , WANG Shengyi2 , LIU Pengbo3 , ZHAO Jian3
( 1. Key Laboratory for Precision and Non-Traditional Machining Technology of the Ministry of Education, Dalian University of Technology, Dalian 116024, China; 2. Key Laboratory for Micro/Nano Technology and System of Liaoning Province, Dalian University of Technology, Dalian 116024, China; 3. School of Automotive Engineering, Dalian University of Technology, Dalian 116024, China )
Abstract：This paper presents a frictional contact MEMS inertial switch to solve the problem of short contact duration and bounce effect of inertial switch. The closing principle of the switch was theoretically analyzed and modeled. A method of enhancing the contact effect by frictional contact was proposed and the switch was designed based on that method. In order to compare the contact performance between frictional contact MEMS inertial switch and other switches, three kinds of inertia switches were fabricated by using UV-LIGA multilayer photolithography and precision micro electroforming. Finally, switches were tested by a standard dropping hammer system and the contact duration of the three switches were obtained. The tested results show that the contact duration of rigid, flexible and frictional contact MEMS inertial switches is 10μs, 80μs and 620μs respectively when applied 400g external acceleration. Both rigid and flexible contact MEMS switches have contact bounce, while frictional contact switches close stably without bounce. The frictional contact MEMS inertial switch has great advantages in enhancing the contact effect.
2021, 
