Abstract：The stylus surface topography measuring instrument is widely used in production and scientific research. Because of its structure, the lever stylus will produce nonlinear error in measurement, which will affect the accuracy of measurement results. This paper introduces a kind of air bearing stylus measuring sensor. The movement direction of the stylus axis is consistent with the displacement measurement direction, which effectively avoids the nonlinear error. In the research, the movement model of the air bearing stylus measuring system is established, the dynamic and static characteristics of the measuring system are analyzed, the factors affecting the radial dynamic performance of the air bearing support are studied, the theoretical simulation of radial stiffness and dynamic parameters is carried out, and the maximum scanning frequency of the sensor is 125Hz through the dynamic characteristic test and analysis; the air bearing stylus surface topography measurement system is built and the measurement experiment is carried out, and the relative error of the sensor measurement is 0.8%.
2021, 
