During the femtosecond laser processing, how to break through the diffraction limit has always been an important problem. In recent years, nanospheres auxiliary femtosecond laser near field processing with characteristic size beyond the diffraction limit is recognized and developed gradually. It can fabricate nanoholes on the substrate surface of which scale is smaller than the incident laser diffraction limit, and can realize large area processing. In this paper, we will focus on the metal nanospheres and dielectric nanospheres, and introduce the study of nanospheres assisted femtosecond laser near field processing.