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| Preliminary Stage of Preparation Technology and Parameters of Flexible Thin-Film Sensor |
| DONG Yiyi, ZHONG Hongjie |
| AVIC Aerodynamics Research Institute, Shenyang 110034, China |
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Abstract Flexible thin film sensors for arrays high frequency heat flux fluctuating signals have promising future in wind tunnel testing. With excellent mechanical properties, chemical stability and high temperature resistance, polyimide is one of the ideal substrate materials for micro fabrication of thin film sensors. However, due to the hydrophobic group on the surface of the material, the prepared metal coating is easy to be destroyed, limiting the applications. In this paper, plasma surface treatment is used to improve the hydrophilicity of the polyimide thin film in the preparation of flexible thin film sensor, The bonding force with the metal material is improved. With the characteristics of UV photoresist denaturation, the design sensor pattern is transferred to the film through the combination of uniform photoresist and photoresist technology. Then the required metal layer is physically deposited by a magnetron sputtering coater to realize the fabrication of micro-nano patterned thin film sensors, the optimum parameters of sputtering power and time are determined by qualitative study of the key process of magnetron sputtering.
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2022, 
