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| Development of Online View System Based on Backscattered Electrons for Electron Beam Processing |
| ZHANG Hongyu 1 , XU Haiying 1,2, LU Kaitong 1,2, ZUO Congjin1 |
| (1. High Energy Beam Generator Laboratory, AVIC Manufacturing Technology Institute, Beijing 100024, China; 2. School of Materials Science and Engineering, Nanjing University of Science and Technology, Nanjing 210094, China) |
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Abstract In order to obtain a clear view of electron beam processing, an online view system was developed based on backscattered electrons with four-plate backscattered electron sensor, high-frequency signal amplification circuit, highfrequency data acquisition card, and high-frequency deflection and scanning system. The experiments indicate that the system can effectively observe the workpiece in the area of 100mm×100mm, the resolution is 512 pixels×512 pixels, and the frames of image processing can reach 6 frames/second.
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2021, 
