With the continuous development of science and technology, the demand for high-purity materials becomes more and more urgent. The high purity material industry has penetrated into various fields of national economy, national defense construction and social life, which plays an important role in economic and social development. The preparation technology for high-purity materials is an important symbol to measure the development level of metallurgical technology in a country. Compared with other melting technologies, electron beam melting technology has the characteristics of high vacuum, high temperature, good controllability, and it is not limited by the shape of the raw material. Therefore, this technology is possible to solve the problems in preparation of high-purity materials. This paper reviews the research status of electron beam melting technology in preparation of high-purity simple substance and multicomponent alloy. Meanwhile, the current major problems and development directions are discussed, which provide ideas for the development of electron beam melting technology with high efficiency, low cost and large-scale application.