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Development and Application of Precision Grinding/Polishing and Measurement Equipment for Large-Size Optical Components |
GUO Yinbiao, PENG Yunfeng, WANG Zhenzhong, BI Guo, YANG Wei, YANG Ping |
( Micro/Nano Machining and Measuring Laboratory, Xiamen University, Xiamen 361005, China ) |
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Abstract The ultra-precision manufacturing of large-size optical component is a complex system engineering that is related to the precision machine, numerical control, manufacturing technique, precision metrology and compensation, all of which depend on the development of the mechanical-electrical-control theory. In this paper, the researching progress in Department of Mechanical and Electrical Engineering of Xiamen University has been presented, which mainly focuses on the development of precision grinding machine and bonnet polishing machine together with the corresponding measuring equipment.
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