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| Design of Small Beam Spot Electron Beam Pulse Bias Power Supply |
| FAN Kai, XU Haiying, YANG Bo, SANG Xinghua |
(National Key Laboratory of Science and Technology on Power Beam Processes，AVIC Manufacturing Technology
Institute, Beijing 100024, China) |
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Abstract In order to obtain a cost-effective electron beam surface treatment technology, using a constant frequency
voltage regulator circuit, we developed a new type of bias pulse power supply. The power supply was composed of a bias
main circuit topology, a bias voltage transformer and a bias rectification filter circuit, where the bias main circuit was composed
of a bias base value generating circuit and a bias voltage generating circuit. The bias value generating circuit controls
the bias voltage pulse base value, and the bias pulse generation circuit controls the bias pulse frequency and the duty ratio.
The pulse base value, pulse frequency and duty ratio of the pulse bias power supply are continuously adjustable, and the
amplitude, beam frequency and duty ratio of the pulse beam are adjusted accordingly. The waveforms of the output voltage
of the pulsed bias power supply and the output waveform of the pulsed bias power supply are stable and tunable, which can
meet the requirements of small beam spot pulse electron beam bombardment process.
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2017, 
