Abstract：nanopositioner stage is built with finite element method. The displacement, stress distribution, natural frequencies and vibration modes of flexible hinge effected by some main factors are analyzed. The influences of main structure parameters on static and dynamic characteristics of the nanopositioner stage are investigated by comprehensively using orthogonal test design. The regression equations of the performances, structure sizes of nanopositioner stage are obtained by using stepwise regression analysis on numerical results, and a prototype is manufactured for verification.
2008, 
