Abstract：Aiming at the problem of machining the micro-inner grooves of slow-wave structure, the key component of microwave vacuum electronic devices, a method of micro-electrical discharge machining the micro-inner grooves is proposed in this paper. The tool electrode was designed and fabricated by means of laminar combination. The EDM parameters with low loss and reliable processing were determined through the technological experiment of this electrode, and the machining of micro-inner groove of slow-wave structure was realized. The results show that the EDM technology and the combination tool electrode are one of the effective methods to solve the problem of slow-wave structure microgroove machining, and the workpiece can meet the requirements of the drawing design.
2020, 
