[1] 刘志峰，张崇高，任家隆.干切削加工技术及应用.北京:机械工业出版社, 2005.
[2] Fuentes G. High temperature tribological characterization of TiAlSiN coatings produced by cathodic arc evaporation. Surface & Coatings Technology, 2010, 205: 1363-1373.
[3] Kim J W, Kim K H, Lee D B, et al. Study on high-temperature oxidation behaviors of Cr-Si-N films. Surface & Coatings Technology, 2006, 200: 6702-6705.
[4] Carvalho S, Rebouta L, Ribeiro E, et al. Structural evolution of Ti-Al-Si-N nanocomposite coatings. Vacuum, 2009,  83: 1206-1212.
[5] Vaz F, Rebouta L, Ramos S, et al. Physical structural and mechanical characterization of Ti1-xSixNy films. Surface and Coatings Technology, 1998(108/109): 236-240.
[6] Niederhofer A, Nesladek P,Mannling H D, et al. Structural properties, internal stress and thermal stability of nc-TiN/a-Si3N4, nc-TiN/TiSix and nc-(Ti1-yAlySix)N superhard nanocomposite coatings reaching the hardness of diamond. Surface and Coatings Technology,1999
( 120/121): 173-178.
[7] Lee E A, Kim K H. Deposition and mechanical properties of Ti-Si-N coated layer on WC-Co by RF inductively coupled plasma-enhanced chemical vapor deposition. Thin Solid Films, 2002(420/421): 371-376.
[8] 马大衍, 马胜利, 徐可为. TiN基纳米复合超硬薄膜的摩擦磨损特性. 中国表面工程, 2004(65): 18-25.
[9] 胡晓萍, 梅芳华, 邵楠,等. TiN/Si3N4界面结构对Ti-Si-N纳米晶复合膜力学性能的影响. 上海交通大学学报, 2002, 39(8): 1363-1367.
[10] Chang C, Lee J, Tseng M. Microstructure corrosion and tribological behaviors of TiAlSiN coatings deposited by cathodic arc plasma deposition. Thin Solid Films , 2009, 517: 5231-5236.
[11] Veprek S. Conventional and new approaches towards the design of novel super hard materials.Surf Coat Technol,1997,97:15-22.
[12] Xu Y F .Fabrication of nanocomposite Ti-Al-Si-N film deposited by reactive unbalanced magnetron sputtering and their properties-modification by high-energy carbon ion implantation[D]. Hongkong: City University of Hongkong, 2009.
[13] Veprek S, Reiprich S. A concept for the design of novel superhard coatings. The Solid Films,1995, 268(1/2): 64-71.
[14] Li S Z, Shi Y L, Peng H R. Ti-Si-N films prepared by plasma-enhanced chemical vapor deposition. Plasma Chemistry and Plasma Processing, 1992, 12: 287.
[15] Winkelmanna A. Zr-Si-N films fabricated using hybrid cathodic arc and chemical vapour deposition:structure vs properties. Surface & Coatings Technology, 2006, 200: 4213-4219.
[16] Kim K H, Choi S, Yoon S.Superhard Ti-Si-N coatings by a hybrid system of arc ion plating and sputtering techniques. Surface and Coatings Technology, 2002, 298: 243-248.
[17] Carvalho S.Microstructure and mechanical properties of nanocomposite (Ti, Si, Al)N coatings. Thin Solid Films, 2001(398/399): 391-396.
[18] Mei F.Microstructure and mechanical properties of reactively sputtered Ti-Si-N nanocomposite films. Materials Letters, 2005. 59: 2442-2445.

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