The MoCN, MoSiN, MoAlN, and MoWN coatings are synthesized on the substrates of stainless steel or silicon (100) with reactive magnetron sputtering method by using Mo, C, Si, Al and W composite target. The microstructure of these fi lms were analyzed by XRD XPS SEMand HRTEM, and the hardness and oxidation
resistance of these fi lms are characterized by nano-indentation and TGA. The results illustrate that the hardness and oxidation resistance of the MoN-based fi lms can be greatly enhanced through the nano-composite method and solid solution strengthening. Therefore, MoN-based hard coatings possess good comprehensive performance and would be applied widely in the aviation industry.