Compared with off-line measurement, on-machine measurement technology has the advantages of low cost, measurement during processing, no handling and repeated clamping. It provides a new technical means for precision manufacturing of complex curved parts such as aviation turbine blade, aircraft fuselage wing skin, nuclear turbine large blade, automobile engine crankshaft and so on. However, there are still two technical difficulties in the actual operation process: (1) The accuracy of the contact type on-machine measurement is high. However, due to the limitation of single point contact acquisition mode, the measurement efficiency can not meet the demand of full-scale mass measurement of industrial parts. It is only suitable for precise measurement of key dimension characteristics of parts or in-depth measurement of complex structures with serious interference. (2) The position and pose calibration accuracy of non-contact sensor directly affects the measurement accuracy, which is also affected by projection direction and measurement depth of field. How to take the above factors into consideration for accurate calibration of sensor pose and automatic planning of mea urement path is an urgent problem to be solved. For these problems, this paper systematically introduces the contact/non-contact on-machine measurement system architecture, contact on-machine measuring path planning, non-contact on-machine measurement parameter calibration and path planning theories. Based on this, iPoint3D OnsitesSan, a special software for non-contact on-machine measurement data collection and processing is developed, and the applications of the software in the measurement of aero-engine impeller, aerospace frame beam wall, aircraft skin, flange sealing surface of nuclear main pump is introduced. The development trend of on-machine measurement technology is discussed in the final.