The high hardness and brittleness of engineering ceramic materials pose severe challenges to their highduty surface processing. In the process of micro-abrasive air-jet processing, researchers at home and abroad have been dedicated to studying the influence of process parameters on the surface morphology of ceramic materials. However, there are still a lot of knowledge gaps in the influence of different mechanical properties between abrasives and materials on the surface morphology of ceramics. In this paper, micro-abrasive air-jet machining experiments were carried out on Si₃N₄, Al₂O₃ and yttrium-stabilized zirconia YSZ ceramics by using Al₂O₃ abrasives to investigate the effects of different erosion processing angles and different mechanical properties of abrasive and workpiece on the erosion depth, surface morphology and surface roughness of the three hard and brittle materials. The results show that the erosion depth of the three ceramic materials is positively correlated with their elastic modulus, and the surface roughness is negatively correlated with their fracture toughness. With the increase of the erosion processing angle, the surface roughness continues to increase and the surface quality continues to decrease. Under the four erosion angles, there are micro-cutting marks and impact craters on the surface of the three ceramic materials, but there are no micro-cracks and grain breakage. The results confirm that the relative mechanical properties between the abrasive and the workpiece are an important factor affecting the surface morphology of ceramic materials. Under the lower elastic modulus ratio and higher fracture toughness ratio, higher surface quality can be obtained.