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| Development of Cold Cathode Electron Gun With Wide-Rectangle Beam Spot |
| LIU Linyue1, ZUO Congjin1, XU Haiying1,2, SANG Xinghua1, SHI Yilei1,3, WANG Zhuang1 |
1. AVIC Manufacturing Technology Institute, Beijing 100024, China;
2. School of Materials Science and Engineering, Nanjing University of Science and Technology, Nanjing 210094, China;
3. School of Mechanical Engineering and Automation, Beihang University, Beijing 100191, China |
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Abstract In order to be applicable to high-efficiency coating of large-format materials, a cold cathode electron gun with wide-rectangle beam spot was designed, the key parameters were simulated, effect of the cathode and anode key parameters on electron beam quality were analyzed, and the optimal dimensions of key components of the electron gun were obtained. Key parameters of the developed electron gun were verified on a morphology testing platform of widerectangle beam spot, the actual test results show that focal length of the electron gun is 200 mm, current density reaches 10.3 A/m2, beam spot length is 650 mm, width is 15 mm, and the designed structure meets the requirements of the widerectangle beam spot emission.
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| PACS: V261.93；TG439.3 |
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2025, 
