The noncontact and nondestructive measurement method for microstructure dynamic properties, which combines micro scan ning laser Doppler vibrometer (SLDV) with the base excitation, the working principle of SLDV, the base exciter and its drive signal are introduced. The testing results of the typical microstructure — micro cantilever beam are given. It consists with the results of the theoretical calculation and FEM which verifies the effectiveness of this
method.