To reduce drilling temperatures and improve the machining quality of CFRP/Ti6Al4V laminates, this study proposed a cryogenic minimum quantity lubrication (CMQL) technique, utilizing the high solubility of lubricant in supercritical carbon dioxide (ScCO₂). Tests were conducted on the droplet atomization performance and output temperature of the CMQL system, followed by low-frequency vibration drilling experiments under CMQL conditions for CFRP/Ti6Al4V laminates. The influence of CO₂ pressure on laminate drilling was analyzed. The results demonstrate that increasing CO₂ pressure enhances the atomization and cooling capability of the CMQL system. When the pressure increases to 8 MPa, CO₂ presents as supercritical state, and the output temperature drops to below –80 ℃. As the system pressure rises from 5 MPa to 9 MPa, the drilling temperatures of CFRP and Ti6Al4V layers decrease by 15.91% and 50.78%, axial forces increase by 65.22% and 20.26%, and torques decrease by 23.33% and 16.77%, respectively. Moreover, the burr height at the Ti6Al4V layer exit decreases by 42.04%, the delamination factor at the CFRP layer exit is reduced by 5.41% and a low roughness of borehole wall of CFRP/Ti6Al4V laminates is achieved at pressures of 7 MPa, 8 MPa and 9 MPa.