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Design and Simulation of High-Frequency Electron Beam Scanning Deflection Coil |
ZHAO Panfeng, LIU Fangjun, ZHANG Wei |
School of Mechanical Engineering and Automation, Beihang University, Beijing 100191, China |
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Abstract In order to improve the frequency and the magnetic field uniformity of electron beam high frequency deflection scanning, based on the working principle of the Helmholtz coil, a high frequency deflection scanning coil was designed using a hollow structure. According to the structure of the electron gun and the technical requirements of electron beam deflection scanning, the required magnetic field strength and the number of ampere turns are calculated. The threedimensional software Pro/e was used to establish the geometric model and the finite element analysis model, and Maxwell was used to simulate the electromagnetic field. The uniformity of the electromagnetic field distribution of the designed high-frequency deflection scanning coil was analyzed, and the actual measurement was made. The measurement results were basically consistent with the simulation results. The magnetic field intensity and magnetic field uniformity generated by the designed deflection scanning coil meet the technical requirements of the high-frequency deflection scanning of the electron beam. The experimental results show that the deflection scanning coil can achieve a scanning range of 350mm×350 mm and high frequency scanning can reach 7000mm/s.
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[1] |
. COVER[J]. Aeronautical Manufacturing Technology, 2022, 65(3): 1-1. |
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