Abstract：The effects of substrate preheating temperature, flow rate and time of filling oxygen on the thermal shock and oxidation resistance at 1150℃ of an YSZ thermal barrier coatings prepared by EB–PVD were studied by means of an orthogonal test. Thethermal shock cycle number of the coating increases to a maximal value as the substrate preheating temperature rises up to a temperature of 900℃. Nonetheless, it decreases as the preheating temperature further rises. Meanwhile, the thermal shock resistance of the YSZ coating increases with the filling oxygen flow rate and filling time, and it becomes approximately constant with the flow rate and filling time fall over a certain range of values. The optimized process parameters for the EB–PVD YSZ coating involve 900℃ of substrate preheating temperature, 200mL/min of oxygen flow rate and 15min of oxygen filling time.